Algorithm for statistical noise reduction in three-dimensional ion implant simulations

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 174, Issue 4, 2001, Pages 433-438

  Hernandez Mangas J M ^a   Arias, J ^a   Jaraiz, M ^a   Bailon L ^a   Barbolla, J ^a  

^a UNIVERSITY OF VALLADOLID   (Spain)

Author keywords

Computer simulation; Ion implantation; Rare event

Indexed keywords

ALGORITHMS; COMPUTER SIMULATION; MONTE CARLO METHODS; SEMICONDUCTING SILICON; SEMICONDUCTOR DOPING; SPURIOUS SIGNAL NOISE;

STATISTICAL NOISE REDUCTION;

ION IMPLANTATION;

EID: 0035342005     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(00)00627-3     Document Type: Article

References (17)