Atomistic simulation of ion implantation into 2D structures

Computational Materials Science

Volumn 11, Issue 2, 1998, Pages 87-95

  Schmidt, Bruno ^a   Posselt, Matthias ^a   Strecker, Norbert ^b   Feudel, Thomas ^c  

^a INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

^b ETH ZURICH   (Switzerland)

^c SYNOPSYS SWITZERLAND LLC   (Switzerland)

Author keywords

2D structures; Atomistic simulation; Ion implantation

Indexed keywords

EID: 0005242386     PISSN: 09270256     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0927-0256(97)00203-6     Document Type: Article

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