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Volumn 26, Issue 5, 2001, Pages 521-526

Hydrogen effect on enhancement of defect reactions in semiconductors: Example for silicon and vacancy defects

Author keywords

Dopant; Silicon; Vacancy

Indexed keywords

ARSENIC; BORON; CRYSTAL LATTICES; HYDROGEN; HYDROGENATION; PHOSPHORUS; POINT DEFECTS; QUANTUM THEORY; SEMICONDUCTOR DOPING; STRESSES;

EID: 0035338888     PISSN: 03603199     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0360-3199(00)00090-2     Document Type: Article
Times cited : (7)

References (21)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.