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Volumn 26, Issue 5, 2001, Pages 521-526
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Hydrogen effect on enhancement of defect reactions in semiconductors: Example for silicon and vacancy defects
a b b e a c c d d
e
NONE
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Author keywords
Dopant; Silicon; Vacancy
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Indexed keywords
ARSENIC;
BORON;
CRYSTAL LATTICES;
HYDROGEN;
HYDROGENATION;
PHOSPHORUS;
POINT DEFECTS;
QUANTUM THEORY;
SEMICONDUCTOR DOPING;
STRESSES;
INTERSTITIALS;
VACANCIES;
SEMICONDUCTING SILICON;
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EID: 0035338888
PISSN: 03603199
EISSN: None
Source Type: Journal
DOI: 10.1016/S0360-3199(00)00090-2 Document Type: Article |
Times cited : (7)
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References (21)
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