High precision scanning angle ellipsometry

Review of Scientific Instruments

Volumn 72, Issue 5, 2001, Pages 2407-2414

  Van Duijvenbode, R C ^a   Van Der Zeeuw, E A ^a   Koper, G J M ^b  

^a LEIDEN UNIVERSITY   (Netherlands)

^b DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035336337     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1368862     Document Type: Article

References (16)

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