Formation of buried oxide layers in molybdenum by high-fluence oxygen ion implantation

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 160, Issue 3, 2000, Pages 363-371

  Renner, Bernd ^a   Hammerl, Claus ^a   Rauschenbach, Bernd ^a  

^a UNIVERSITY OF AUGSBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; ANNEALING; ION BOMBARDMENT; ION IMPLANTATION; MORPHOLOGY; OXIDES; OXYGEN; RADIATION DAMAGE; RUTHERFORD BACKSCATTERING SPECTROSCOPY; TRANSMISSION ELECTRON MICROSCOPY; X RAY CRYSTALLOGRAPHY;

BURIED OXIDE LAYERS; MOLYBDENUM OXIDE;

MOLYBDENUM;

EID: 0033886979     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(99)00606-0     Document Type: Article

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