Determination of phase-step errors of kinoform gratings from their diffraction efficiencies

Optical Engineering

Volumn 40, Issue 5, 2001, Pages 692-697

  Jaroszewicz, Z ^a   Kolodziejczyk, A ^a   Kowalik, A ^a   Restrepo, R ^a  

^a UNIVERSIDAD NACIONAL DE COLOMBIA   (Colombia)

Author keywords

Fraunhofer diffraction; Kinoforms; Lithography; Phase gratings

Indexed keywords

LITHOGRAPHY; MEASUREMENT ERRORS; SPECTRUM ANALYSIS;

DIFFRACTION EFFICIENCY; KINOFORM GRATINGS;

DIFFRACTION GRATINGS;

EID: 0035329780     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1358296     Document Type: Article

References (14)

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5. Aztec surface-relief volume diffractive structure
6. Diffraction efficiency of quantized programmable phase elements: A critical assessment
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10. Damman gratings for laser beam shaping
11. Reduction of the zero-order intensity in binary Damman grating
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13. Continuous-relief diffractive optical elements for two-dimensional array generation