A new optical technique for characterizing reference artefacts for surface profilometry

Nanotechnology

Volumn 8, Issue 1, 1997, Pages 35-39

  Watts, R A ^a   Sambles, J R ^a   Hutley, M C ^b   Preist, T W ^a   Lawrence, C R ^a  

^a UNIVERSITY OF EXETER   (United Kingdom)

^b NATIONAL PHYSICAL LABORATORY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; LIGHT REFLECTION; SURFACE MEASUREMENT; SURFACE PHENOMENA;

SURFACE PROFILOMETRY; TAYLSTEP STYLUS;

DIFFRACTION GRATINGS;

EID: 0031098823     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/8/1/009     Document Type: Article

References (6)

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3. Wood E L, Sambles J R, Cotter N P and Kitson S C 1995 J. Mod. Opt. 42 1343
4. Pockrand I 1974 Phys. Lett. 49A 259
5. Pipino A and Schatz G C 1994 J. Opt. Soc. Am. B 11 2036
6. Allen R, Foster M and Yen Yang-Tsai 1982 J. Electrochem. Soc. 129 1379