Integration of terraced laser diode and garnet crystals by wafer direct bonding

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 40, Issue 5 A, 2001, Pages 3463-3467

  Yokoi, Hideki ^a   Waniishi, Takashi ^a   Mizumoto, Tetsuya ^a   Shimizu, Masafumi ^a   Sakurai, Kazumasa ^a   Futakuchi, Naoki ^b   Nakano, Yoshiaki ^b  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^b UNIVERSITY OF TOKYO   (Japan)

Author keywords

Garnet crystals; InP; Laser diode; Optical isolator; Reactive ion etching; Wafer direct bonding

Indexed keywords

BONDING; CRYSTALS; GASES; MIRRORS; PULSED LASER APPLICATIONS; REACTIVE ION ETCHING; WSI CIRCUITS;

OPTICAL ISOLATORS;

SEMICONDUCTOR LASERS;

EID: 0035328745     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.40.3463     Document Type: Article

References (14)