Field emission current cleaning and annealing of microfabricated cold cathodes

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 19, Issue 3, 2001, Pages 980-987

  Schwoebel, P R ^a   Spindt, C A ^a   Holland, C E ^a   Panitz, J A ^b  

^a SRI INTERNATIONAL   (United States)

^b UNIVERSITY OF NEW MEXICO   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CURRENT VOLTAGE CHARACTERISTICS; DESORPTION; ELECTRIC CURRENTS; SURFACE CLEANING; THERMAL EFFECTS;

THERMAL CLEANING;

FIELD EMISSION CATHODES;

EID: 0035326379     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1349206     Document Type: Conference Paper

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