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Volumn 19, Issue 3, 2001, Pages 866-869

Secondary electron emission characteristics for sol-gel based SiO2 thin films

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTRON MULTIPLIERS; SECONDARY EMISSION; SILICA; SOL-GELS; SUBSTRATES; THERMAL EFFECTS; VACUUM;

EID: 0035326319     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1373640     Document Type: Conference Paper
Times cited : (3)

References (12)
  • 7
    • 0001494663 scopus 로고
    • edited by S. M. Sze McGraw-Hill, New York
    • A. C. Adams, in VLSI Technology, edited by S. M. Sze (McGraw-Hill, New York, 1988), p. 233.
    • (1988) VLSI Technology , pp. 233
    • Adams, A.C.1
  • 10
    • 0003615113 scopus 로고    scopus 로고
    • to be published
    • T. Jeong et al. (to be published).
    • Jeong, T.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.