Development of SMD 32.768 kHz tuning fork-type crystals using photolithography and selective etching process Part I: Selective etching of an array of quartz tuning fork resonators

Zeitschrift fuer Metallkunde/Materials Research and Advanced Techniques

Volumn 92, Issue 5, 2001, Pages 501-503

  Lee, S ^a   Kang, K M ^a  

^a Samsung Electro Mechanics   (South Korea)

Author keywords

Etching; Photolithography; Quartz; Tuning fork; Wafer

Indexed keywords

ACETONE; AMMONIUM COMPOUNDS; CRYSTALLOGRAPHY; ETCHING; METALLIZING; PHOTORESISTS; QUARTZ APPLICATIONS; SOLUTIONS; STRIPPING (REMOVAL);

AMMONIUM BIFLUORIDE; QUARTZ TUNING FORKS; QUARTZ WAFER; SELECTIVE ETCHING PROCESS;

CRYSTAL RESONATORS;

EID: 0035325659     PISSN: 00443093     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (10)