SCOPUS 정보 검색 플랫폼

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 131, Issue 1-4, 1997, Pages 109-120

Metallic impurities diffusion in a polymer film (Kapton) under and out of irradiation

(2) Marin, N a Serruys, Y a

a CEA SACLAY (France)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; COPPER; DIFFUSION IN SOLIDS; ELECTRON MICROSCOPY; IMPURITIES; INTERFACES (MATERIALS); ION BOMBARDMENT; NICKEL; POLYIMIDES; RADIATION EFFECTS; SPUTTER DEPOSITION; TITANIUM;

BACKSCATTERING SPECTROMETRY; POLYMER FILM KAPTON;

PLASTIC FILMS;

EID: 0031549180 PISSN: 0168583X EISSN: None Source Type: Journal
DOI: 10.1016/S0168-583X(97)00197-3 Document Type: Article

Times cited : (21)

References (16)

1
- 0040815686
- F.K. Legoues, B.D. Silverman and P.S. Ho, J. Vac. Sci. Technol. A 6 (1988) 2200.
- (1988) J. Vac. Sci. Technol. A , vol.6 , pp. 2200
- Legoues, F.K.¹ Silverman, B.D.² Ho, P.S.³

2
- 36549094286
- J.H. Das and J.E. Morris, J. Appl. Phys. 66 (1989) 5816.
- (1989) J. Appl. Phys. , vol.66 , pp. 5816
- Das, J.H.¹ Morris, J.E.²

3
- 36549103161
- F. Faupel, D. Gupta, B.D. Silverman and P.S. Ho, Appl. Phys. Lett. 55 (1989) 357.
- (1989) Appl. Phys. Lett. , vol.55 , pp. 357
- Faupel, F.¹ Gupta, D.² Silverman, B.D.³ Ho, P.S.⁴

4
- 84957284833
- P.M. Sanda, J.W. Bartha, J.G. Clabes, J.L. Jordan, C. Feber, B.D. Silverman and P.S. Ho, J. Vac. Sci. Technol. A 4 (1986) 1035.
- (1986) J. Vac. Sci. Technol. A , vol.4 , pp. 1035
- Sanda, P.M.¹ Bartha, J.W.² Clabes, J.G.³ Jordan, J.L.⁴ Feber, C.⁵ Silverman, B.D.⁶ Ho, P.S.⁷

5
- 84957275169
- F.S. Ohuchi and S.C. Freilich, J. Vac. Sci. Technol. A 4 (1986) 1039.
- (1986) J. Vac. Sci. Technol. A , vol.4 , pp. 1039
- Ohuchi, F.S.¹ Freilich, S.C.²

6
- 0004108136
- Elsevier, Amsterdam
- D.W. Clegg and A.A. Collyer, Irradiation Effects on Polymers (Elsevier, Amsterdam, 1991).
- (1991) Irradiation Effects on Polymers
- Clegg, D.W.¹ Collyer, A.A.²

7
- 0040220629
- Thesis, Paris XI Orsay no. 4012 or Rapport C.E.A. R-5713
- N. Marin, Thesis, Paris XI Orsay no. 4012 or Rapport C.E.A. R-5713 (1996).
- (1996)
- Marin, N.¹

8
- 0013062056
- Y. Serruys, J. Tirira and P. Calmon, Nucl. Instr. and Meth. B 74 (1993) 565.
- (1993) Nucl. Instr. and Meth. B , vol.74 , pp. 565
- Serruys, Y.¹ Tirira, J.² Calmon, P.³

9
- 0000221008
- N. Marin, Y. Serruys and P. Calmon, Nucl. Instr. and Meth. B 108 (1996) 179.
- (1996) Nucl. Instr. and Meth. B , vol.108 , pp. 179
- Marin, N.¹ Serruys, Y.² Calmon, P.³

10
- 0039036578
- ICEM 13-Paris
- N. Marin, L. Boulanger and Y. Serruys, ICEM 13-Paris (1994) 1211.
- (1994) , pp. 1211
- Marin, N.¹ Boulanger, L.² Serruys, Y.³

11
- 0005671888
- P. Trocellier, J. Tirira, P. Massiot, J. Gosset and J.M. Costantini, Nucl. Instr. and Meth. B 54 (1991) 118.
- (1991) Nucl. Instr. and Meth. B , vol.54 , pp. 118
- Trocellier, P.¹ Tirira, J.² Massiot, P.³ Gosset, J.⁴ Costantini, J.M.⁵

12
- 0000424225
- N. Marin and Y. Serruys, Nucl. Instr. and Meth. B 105 (1995) 175.
- (1995) Nucl. Instr. and Meth. B , vol.105 , pp. 175
- Marin, N.¹ Serruys, Y.²

13
- 0002869102
- J. Davenas, Solid State Phenom. 30/31 (1993) 317.
- (1993) Solid State Phenom. , vol.30-31 , pp. 317
- Davenas, J.¹

14
- 84945604405
- T.S. Oh, S.P. Kowalczyk, D.J. Hunt, J. Kim, J. Adhesion Sci. Technol. 4 (1990) 119.
- (1990) J. Adhesion Sci. Technol. , vol.4 , pp. 119
- Oh, T.S.¹ Kowalczyk, S.P.² Hunt, D.J.³ Kim, J.⁴

15
- 0001634596
- D.L. Pappas, J.J. Cuomo, J. Vac. Sci. Technol. A 9 (1991) 2704.
- (1991) J. Vac. Sci. Technol. A , vol.9 , pp. 2704
- Pappas, D.L.¹ Cuomo, J.J.²

16
- 0002046206
- F. Faupel, Phys. Status Solidi (a) 134 (1992) 9.
- (1992) Phys. Status Solidi (A) , vol.134 , pp. 9
- Faupel, F.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.