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Volumn 175-177, Issue , 2001, Pages 688-693
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Intrinsic residual stresses in metal films synthesized by energetic particle deposition
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Author keywords
Interatomic potentials; Ion beam synthesis; Metal thin films; Residual stress
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Indexed keywords
COALESCENCE;
ION BOMBARDMENT;
MATHEMATICAL MODELS;
PHYSICAL VAPOR DEPOSITION;
RESIDUAL STRESSES;
SYNTHESIS (CHEMICAL);
TENSILE STRESS;
THIN FILMS;
ENERGETIC PARTICLE DEPOSITIONS;
INTERATOMIC POTENTIALS;
ION BEAM SYNTHESIS;
METALLIC FILMS;
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EID: 0035302549
PISSN: 0168583X
EISSN: None
Source Type: Journal
DOI: 10.1016/S0168-583X(00)00537-1 Document Type: Conference Paper |
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Times cited : (8)
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References (11)
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