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Journal of Materials Science: Materials in Electronics

Volumn 12, Issue 4-6, 2001, Pages 317-321

DLTS and conductance transient investigation on defects in anodic tantalum pentoxide thin films

(5) Duenas S a Castan H a Barbolla, J a Kola, R R b Sullivan, P A b

a UNIVERSITY OF VALLADOLID (Spain)

b LUCENT TECHNOLOGIES (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANODIC OXIDATION; CAPACITORS; DIELECTRIC FILMS; ELECTRIC BREAKDOWN; ELECTRIC CONDUCTIVITY MEASUREMENT; ELECTRIC INSULATORS; LEAKAGE CURRENTS; SEMICONDUCTOR DEVICES; SPECTROSCOPIC ANALYSIS; TANTALUM COMPOUNDS; THRESHOLD VOLTAGE;

DEEP LEVEL TRANSIENT INVESTIGATION SPECTROSCOPY; LOW DEFECT DENSITY; POOLE-FRENKEL EFFECT;

THIN FILMS;

EID: 0035299946 PISSN: 09574522 EISSN: None Source Type: Journal
DOI: 10.1023/A:1011292210991 Document Type: Article

Times cited : (5)

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