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Volumn 114-116, Issue , 2001, Pages 415-420
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XPS investigation of the equilibrium segregation of antimony at germanium surface
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Author keywords
[No Author keywords available]
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Indexed keywords
ARGON;
BINDING ENERGY;
ETCHING;
HEAT TREATMENT;
INTERDIFFUSION (SOLIDS);
SEGREGATION (METALLOGRAPHY);
SEMICONDUCTING GERMANIUM;
SEMICONDUCTOR DOPING;
VACUUM APPLICATIONS;
X RAY PHOTOELECTRON SPECTROSCOPY;
ATOMIC DIFFUSION;
SURFACE SEGREGATION;
SEMICONDUCTING ANTIMONY;
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EID: 0035277867
PISSN: 03682048
EISSN: None
Source Type: Journal
DOI: 10.1016/S0368-2048(00)00385-6 Document Type: Article |
Times cited : (4)
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References (16)
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