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Volumn 134, Issue 1-4, 1998, Pages 275-282

KRXPS study of the oxidation of Ge(001) surface

Author keywords

Ge oxidation; Semiconductor surface; XPS

Indexed keywords

DECOMPOSITION; ETCHING; OXIDATION; OXIDES; OXYGEN; SEMICONDUCTOR GROWTH; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 0032167268     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(98)00251-7     Document Type: Article
Times cited : (13)

References (6)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.