|
Volumn 134, Issue 1-4, 1998, Pages 275-282
|
KRXPS study of the oxidation of Ge(001) surface
|
Author keywords
Ge oxidation; Semiconductor surface; XPS
|
Indexed keywords
DECOMPOSITION;
ETCHING;
OXIDATION;
OXIDES;
OXYGEN;
SEMICONDUCTOR GROWTH;
X RAY PHOTOELECTRON SPECTROSCOPY;
GERMANIUM OXIDES;
KINETIC RESOLVED X RAY PHOTOELECTRON SPECTROSCOPY (KRXPS);
SEMICONDUCTING GERMANIUM;
|
EID: 0032167268
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/S0169-4332(98)00251-7 Document Type: Article |
Times cited : (13)
|
References (6)
|