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Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films

Volumn 19, Issue 2, 2001, Pages 539-546

Characteristics of a large diameter reactive ion beam generated by an electron cyclotron resonance microwave plasma source

(3) Geisler, St a Brockhaus, A a Engemann, J a

a UNIVERSITY OF WUPPERTAL (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; CURRENT DENSITY; ELECTROCHEMICAL ELECTRODES; ELECTRON CYCLOTRON RESONANCE; ION BEAMS; PARTICLE OPTICS; PLASMA SOURCES;

ELECTRON CYCLOTRON RESONANCE MICROWAVE PLASMA SOURCES;

ION SOURCES;

EID: 0035273636 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.1347051 Document Type: Article

Times cited : (4)

References (17)

1
- 0343913109
- (1995) Plasma Sources Sci. Technol. , vol.3 , pp. 473
- Werner, F.¹ Korzec, D.² Engemann, J.³

2
- 21844487469
- (1995) J. Vac. Sci. Technol. A , vol.13 , pp. 875
- Engemann, J.¹ Schott, M.² Werner, F.³ Korzec, D.⁴

3
- 0030134590
- (1996) Plasma Sources Sci. Technol. , vol.5 , pp. 216
- Korzec, D.¹ Werner, F.² Winter, R.³ Engemann, J.⁴

4
- 0005082995
- (1992) J. Sci. Instrum. , vol.63 , pp. 3068
- Korzec, D.¹ Engemann, J.² Rapp, J.³

5
- 0005056785
- (1993) Proc. SPIE , vol.120 , pp. 2014
- Korzec, D.¹ Keller, H.M.² Engemann, J.³

6
- 0005097112
- VDI, Duesseldorf
- (1993) Kapazitiv Gekoppelte Hochfrequenz-Ionenquelle mit Radialer Anordnung der Anregungselektroden fuer Reaktives Iononstrahlaetzen
- Korzec, D.¹

7
- 0029373464
- (1995) Surf. Coat. Technol. , vol.74 , pp. 534
- Yuan, Y.¹ Bansky, J.² Engemann, J.³ Brockhaus, A.⁴

8
- 0005103604
- VDI, Duesseldorf
- (1991) Nicht Konventioneller Einstatz von Green-Tape-Keramik-Filmen fuer Mikrotechnische Anwendungen
- Keller, H.M.¹ Engemann, J.² Bansky, J.³ Korzec, D.⁴

9
- 0003494734
- edited by W. Lochte-Holtgrewen (Springer, Berlin)
- (1995) Plasma Diagnostics
- Schott, L.¹

10
- 0003730831
- Wiley, New York
- (1994) Principles of Plasma Discharges and Materials Processing
- Lieberman, M.A.¹ Lichtenberg, A.J.²

11
- 0028448136
- (1994) J. Electrochem. Soc. , vol.141 , pp. 1546
- Lee, C.¹ Graves, D.B.² Lieberman, M.A.³ Hess, D.W.⁴

12
- 0001510759
- (1965) J. Electrochem. Soc. , vol.43 , pp. 1480
- Rapp, D.¹

13
- 0001667585
- (1994) Plasma Sources Sci. Technol. , vol.3 , pp. 539
- Brockhaus, A.¹

14
- 0005050201
- VEB, Leipzig
- (1985) Wissenspeicher Vakuumtechnik
- Edelmann, C.¹

15
- 0003773056
- E. Spoon and F. N. Spoon, London
- (1974) Vacuum Manual
- Holland, C.¹ Steckelmacher, W.² Yarwood, J.³

16
- 0031101854
- (1997) Phys. Rev. E , vol.55 , pp. 3450
- Schwabedissen, A.¹ Benck, E.C.² Roberts, J.R.³

17
- 0000208288
- (1995) Plasma Sources Sci. Technol. , vol.4 , pp. 332
- Godyak, V.A.¹ Piejak, R.B.² Alexandrovich, B.M.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.