Comparative study of microstructure in a-CxN1-x films deposited by radiofrequency magnetron sputtering

Diamond and Related Materials

Volumn 10, Issue 3-7, 2001, Pages 1156-1159

  Durand Drouhin, O ^a   Lejeune, M ^a   Clin, M ^a   Benlahsen, M ^a   Henocque, J ^a   Zeinert, A ^a  

^a Universite de Picardie Jules Verne   (France)

Author keywords

Amorphous carbon; Characterization; Nitrides; Sputtering

Indexed keywords

CARBON NITRIDE; INFRARED SPECTROSCOPY; LIGHT TRANSMISSION; MAGNETRON SPUTTERING; MICROSTRUCTURE; PHOTOLUMINESCENCE; RAMAN SPECTROSCOPY;

OPTICAL GAP;

THIN FILMS;

CARBON NITRIDE;

EID: 0035270164     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(00)00482-9     Document Type: Article

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