Experimental and numerical study on pulsed-laser annealing process of diamond-like carbon thin films

Diamond and Related Materials

Volumn 10, Issue 3-7, 2001, Pages 905-909

  Nakamiya, Toshiyuki ^a   Aoqui, Shin Ichi ^b   Ebihara, Kenji ^c  

^a TOKAI UNIVERSITY   (Japan)

^b SOJO UNIVERSITY   (Japan)

^c Kumamoto University   (Japan)

Author keywords

Damage temperature; DLC film; FEM; Pulsed laser annealing

Indexed keywords

ANNEALING; EXCIMER LASERS; GRAPHITIZATION; HEAT CONDUCTION; IRRADIATION; SURFACE PHENOMENA; VAPORIZATION;

THRESHOLD ENERGY;

DIAMOND LIKE CARBON FILMS;

DIAMOND-LIKE CARBON;

EID: 0035269498     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(00)00536-7     Document Type: Article

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