SQUID photoscanning: An imaging technique for NDE of semiconductor wafers and devices based on photomagnetic detection

IEEE Transactions on Applied Superconductivity

Volumn 11, Issue 1 I, 2001, Pages 1162-1167

  Beyer, J ^a   Drung, D ^a   Schurig, T ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

Nondestructive testing; Semiconductor materials; SQUIDs

Indexed keywords

COMPUTER SIMULATION; DIGITAL SIGNAL PROCESSING; GRAIN BOUNDARIES; IMAGING TECHNIQUES; LASER BEAM EFFECTS; MAGNETIC FIELD EFFECTS; MAGNETOMETERS; PHOTOCURRENTS; SEMICONDUCTOR DOPING; SQUIDS;

LASER ILLUMINATION; PHOTOMAGNETIC DETECTION; PHOTOSCANNING;

SUPERCONDUCTING DEVICES;

EID: 0035268111     PISSN: 10518223     EISSN: None     Source Type: Journal    
DOI: 10.1109/77.919555     Document Type: Conference Paper

References (11)

1. Applications of SQUID magnetometers to biomagnetism and nondestructive evaluation
2. Miniature SQUID suceptometer
3. Design and applications of a scanning SQUID microscope
4. Study of photo-magnetic effects and ESR in silicon doped with shallow centers using a SQUID magnetometer
5. Integrated magnetic spectroscopy of dilute magnetic semiconductors
6. SQUID-NDE of semiconductors samples with high-spatial resolution
7. Magnetic detection of photogenerated currents in semiconductor wafers using superconduction quantum interference devices
8. Improved direct-coupled de SQUID read-out electronics with automatic bias voltage tuning
9. Photomagnetic detection of doping hnhomogeneities in silicon crystals using SQUID magnetometers
10. Grain boundary recombination Theory and experiment in silicon