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Volumn 43, Issue 1, 2001, Pages 66-72

Markov random fields in pattern recognition for semiconductor manufacturing

Author keywords

[No Author keywords available]

Indexed keywords

MATHEMATICAL MODELS; MAXIMUM LIKELIHOOD ESTIMATION; NEURAL NETWORKS; PATTERN RECOGNITION; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON WAFERS;

EID: 0035253262     PISSN: 00401706     EISSN: None     Source Type: Trade Journal    
DOI: 10.1198/00401700152404336     Document Type: Article
Times cited : (5)

References (15)
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    • Besag, J.1
  • 2
    • 0003369432 scopus 로고
    • Fundamentals of statistical exponential families with applications in statistical decision theory
    • Hayward, CA: Institute of Mathematical Statistics
    • Brown, L. D. (1986), Fundamentals of Statistical Exponential Families With Applications in Statistical Decision Theory (Lecture Notes-Monograph Series, Vol. 9), Hayward, CA: Institute of Mathematical Statistics.
    • (1986) Lecture Notes-Monograph Series , vol.9
    • Brown, L.D.1
  • 3
    • 0000695777 scopus 로고
    • On consistency of a class of estimators for exponential families of Markov random fields on the lattice
    • Comets, F. (1992), "On Consistency of a Class of Estimators for Exponential Families of Markov Random Fields on the Lattice," The Annals of Statistics, 20, 455-468.
    • (1992) The Annals of Statistics , vol.20 , pp. 455-468
    • Comets, F.1
  • 5
    • 0003770610 scopus 로고
    • Neural networks, algorithms, applications, and programming techniques
    • Reading MA: Addison-Wesley
    • Freeman, J. A., and Skapura, D. M. (1991), Neural Networks, Algorithms, Applications, and Programming Techniques (Computation and Neural Systems Series), Reading MA: Addison-Wesley.
    • (1991) Computation and Neural Systems Series
    • Freeman, J.A.1    Skapura, D.M.2
  • 6
    • 0019576202 scopus 로고
    • Poisson process and integrated circuit yield prediction
    • Hemmert, R. S. (1981), "Poisson Process and Integrated Circuit Yield Prediction," Solid-State Electronics, 24, 511-515.
    • (1981) Solid-state Electronics , vol.24 , pp. 511-515
    • Hemmert, R.S.1
  • 7
    • 0022085714 scopus 로고
    • Point defect yield model for wafer scale integration
    • Ketchen, M. B. (1985), "Point Defect Yield Model for Wafer Scale Integration," IEEE Circuits and Devices Magazine, 1, 24-34.
    • (1985) IEEE Circuits and Devices Magazine , vol.1 , pp. 24-34
    • Ketchen, M.B.1
  • 8
    • 0029752372 scopus 로고    scopus 로고
    • Sequential screening in semiconuctor manufacturing, I: Exploiting spatial dependence
    • Longtin, M. D., Wein, L. M., and Welsch, R. E. (1996), "Sequential Screening in Semiconuctor Manufacturing, I: Exploiting Spatial Dependence," Operations Research, 44, 173-195.
    • (1996) Operations Research , vol.44 , pp. 173-195
    • Longtin, M.D.1    Wein, L.M.2    Welsch, R.E.3
  • 10
    • 0023997392 scopus 로고
    • A statistical model for integrated-circuit yield with clustered flaws
    • Shier, J. (1988), "A Statistical Model for Integrated-Circuit Yield With Clustered Flaws," IEEE Transactions on Electronic Devices, 35, 524-525.
    • (1988) IEEE Transactions on Electronic Devices , vol.35 , pp. 524-525
    • Shier, J.1
  • 11
    • 0016648432 scopus 로고
    • On a composite model to the IC yield problem
    • Stapper, C. H. (1975), "On a Composite Model to the IC Yield Problem," IEEE Journal of Solid-State Circuits. ED-20, 655-657.
    • (1975) IEEE Journal of Solid-state Circuits , vol.ED-20 , pp. 655-657
    • Stapper, C.H.1
  • 12
    • 0024629198 scopus 로고
    • Large area fault clusters and fault tolerance in VLSI circuits: A review
    • _ (1989), "Large Area Fault Clusters and Fault Tolerance in VLSI Circuits: A Review." IBM Journal of Research and Development, 33, 162-173.
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  • 14
    • 0027591382 scopus 로고
    • Detecting spatial effects from factorial experiments: An application from integrated-circuit manufacturing
    • Taam, W., and Hamada, M. (1993), "Detecting Spatial Effects From Factorial Experiments: An Application from Integrated-Circuit Manufacturing," Technometrics, 35, 149-160.
    • (1993) Technometrics , vol.35 , pp. 149-160
    • Taam, W.1    Hamada, M.2
  • 15
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.