Realization of polycrystalline silicon magnetic sensors

Sensors and Actuators, A: Physical

Volumn 88, Issue 2, 2001, Pages 133-138

  Le Bihan, F ^a   Carvou, E ^a   Fortin, B ^a   Rogel, R ^a   Salaun A C ^a   Bonnaud, O ^a  

^a UNIVERSITÉ DE RENNES 1   (France)

Author keywords

[No Author keywords available]

Indexed keywords

HALL EFFECT DEVICES; MAGNETIC FIELD EFFECTS; POLYCRYSTALLINE MATERIALS; SEMICONDUCTOR DOPING; SENSITIVITY ANALYSIS; THIN FILM TRANSISTORS;

MAGNETIC SENSORS;

SILICON SENSORS;

EID: 0035251397     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(00)00506-9     Document Type: Article

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