Probe of the vicinal Si(1 1 1) surface by second harmonic phase spectroscopy

Materials Science in Semiconductor Processing

Volumn 4, Issue 1-3, 2001, Pages 51-53

  Schuhmacher, D ^a   Marowsky, G ^a   Fedyanin, A A ^b   Dolgova, T V ^b   Aktsipetrov, O A ^b  

^a LASER LABORATORIUM GÖTTINGEN E V   (Germany)

^b MOSCOW STATE UNIVERSITY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL ORIENTATION; OXIDATION; PHASE MEASUREMENT; SECOND HARMONIC GENERATION; SPECTROSCOPIC ANALYSIS;

SECOND HARMONIC PHASE SPECTROSCOPY;

SEMICONDUCTING SILICON;

EID: 0035247774     PISSN: 13698001     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1369-8001(00)00112-8     Document Type: Article

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