Advanced time-of-flight secondary ion mass spectrometry analyses for application to TFT-LCD

Materials Science in Semiconductor Processing

Volumn 4, Issue 1-3, 2001, Pages 309-312

  Takatsuji, Hiroshi ^a  

^a IBM JAPAN LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

FAILURE ANALYSIS; SECONDARY ION MASS SPECTROMETRY; THIN FILM TRANSISTORS;

TIME-OF-FLIGHT SECONDARY ION MASS SPECTROMETRY (TOF-SIMS);

LIQUID CRYSTAL DISPLAYS;

EID: 0035247607     PISSN: 13698001     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1369-8001(00)00108-6     Document Type: Article

References (3)

1. Lee J.J., Lindley P.M., Odom R.W. Mater Res Soc Symp Proc. 345:1994;197-204.
2. Groenewold G.S., Gresham G.L., Gianotto A.K., Avci R. Investigation and forensic science technologies. Proc SPIE. 3576:1998;60-65.
3. Hattori A. J Non-Crystalline Solids. 218:1997;196-204.