Hydrogenation in laser annealed polysilicon thin-film transistors (TFTs)

Thin Solid Films

Volumn 383, Issue 1-2, 2001, Pages 151-153

  Farmakis, F V ^a   Tsamados, D M ^a   Brini, J ^a   Kamarinos, G ^a   Dimitriadis, C A ^b   Miyasaka, M ^c  

^a Grenoble INP Phelma   (France)

^b ARISTOTLE UNIVERSITY OF THESSALONIKI   (Greece)

^c SEIKO EPSON CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CRYSTAL DEFECTS; HYDROGENATION; LASER APPLICATIONS; PLASMA ACCELERATORS; POLYSILICON;

LASER ANNEALING; PLASMA HYDROGENATION;

THIN FILM TRANSISTORS;

EID: 0035246791     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(00)01588-1     Document Type: Article

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