Novel large-area high-resolution-transmission-electron-microscopy technique using specimens fabricated by a focused ion beam apparatus

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 40, Issue 2 B, 2001, Pages 1100-1103

  Suematsu, Hisayuki ^a,b   Udo, Koichi ^c   Hisatsune, Kunihiro ^c   Yatsui, Kiyoshi ^b   Yamauchi, Hisao ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^b NAGAOKA UNIVERSITY OF TECHNOLOGY   (Japan)

^c NAGASAKI UNIVERSITY   (Japan)

Author keywords

Chemical analysis; EDS; FIB; LA HRTEM observation

Indexed keywords

COMPOSITION; ENERGY DISPERSIVE SPECTROSCOPY; GRAIN BOUNDARIES; HIGH RESOLUTION ELECTRON MICROSCOPY; INTERFACES (MATERIALS); ION BEAMS; POSITIVE IONS; SILICA; SPECTRUM ANALYSIS;

FOCUSSED ION BEAMS (FIB); HIGH-RESOLUTION-TRANSMISSION-ELECTRON-MICROSCOPY (HRTEM);

TRANSMISSION ELECTRON MICROSCOPY;

EID: 0035245628     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.40.1100     Document Type: Article

References (10)