Characterization of fully depleted SOI transistors after removal of the silicon substrate

IEEE International SOI Conference

Volumn , Issue , 2001, Pages 113-114

  Burns, J ^a   Warner, K ^a   Gouker, P ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; IONIZING RADIATION; OXIDATION; SILICON WAFERS; SINTERING; SUBSTRATES; THERMODYNAMIC STABILITY; X RAY ANALYSIS;

OPTICAL MICROGRAPHS;

SILICON ON INSULATOR TECHNOLOGY;

EID: 0035173067     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)