Microeconomics of accelerated shrinks in demand-limited markets

IEEE International Symposium on Semiconductor Manufacturing Conference, Proceedings

Volumn , Issue , 2001, Pages 191-194

  Monahan, K ^a   Engineer, A ^a   Falessi, G ^a   Hankinson, M ^a   Sung Jin Lee, ^a   Levy, A ^a   Slessor, M ^a  

^a KLA TENCOR CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COST EFFECTIVENESS; DYNAMIC RANDOM ACCESS STORAGE; PROCESS CONTROL;

MICROECONOMIC MODELS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0035164866     PISSN: 1523553X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. Accelerated yield learning in aggressive lithography
2. Sampling plan optimization for detection of lithography and etch CD process excursions