Low voltage tunable capacitors for RF MEM filters and antenna applications

IEEE Antennas and Propagation Society, AP-S International Symposium (Digest)

Volumn 3, Issue , 2001, Pages 670-673

  Jose, K A ^a   Yoon, H ^a   Vinoy, K J ^a   Sharma, P ^a   Varadan, V K ^a   Varadan, V V ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; ETCHING; FERROELECTRIC THIN FILMS; MICROELECTROMECHANICAL DEVICES; MICROSENSORS; PERMITTIVITY; PHASE SHIFT; PHOTOLITHOGRAPHY; WAVE FILTERS;

LOW VOLTAGE TUNABLE CAPACITORS;

ANTENNA PHASED ARRAYS;

EID: 0035157842     PISSN: 15223965     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

1. A novel BST storage capacitor node technology using platinum electrodes for Gbit DRAMs
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3. A novel microwave planar phase shifter
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6. 3 thin films for integrated high frequency capacitors
7. Diffuse phase transitions, electrical conduction and low temperature dielectric properties of sol-gel derived ferroelectric barium titanate thin films