Effect of mixing of hydrogen into nitrogen plasma

Applied Surface Science

Volumn 169-170, Issue , 2001, Pages 612-616

  Hirohata, Y ^a   Tsuchiya, N ^a   Hino, T ^a  

^a HOKKAIDO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON CYCLOTRON RESONANCE; EMISSION SPECTROSCOPY; HYDROGEN; MOLECULAR DYNAMICS; MOLECULAR STRUCTURE; NITRIDING; NITROGEN; SUBSTRATES;

NITROGEN MOLECULAR IONS; NITROGEN-HYDROGEN MIXED PLASMAS; OPTICAL EMISSION SPECTROSCOPY;

SEMICONDUCTOR PLASMAS;

EID: 0035129852     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(00)00799-6     Document Type: Article

References (7)

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3. M. Konuma, Basic Theory of Plasma and Film Deposition, Nikkan Kogyo, Tokyo, 1985, pp. 33-34.
4. S. Ohtori, et al., Theory of Ionic Gas, Ohm, Tokyo, 1992, p. 30.
5. R.W.B. Pearse, A.G. Gaydon, The Indication of Molecular Spectra, Chapman & Hall, London, 1976, p. 219.
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7. C.D. Wagner, Handbook of X-ray Photoemission Spectroscopy, Perkin Elmer, Eden Praine, 1979, p. 52.