Development of the quadruple mass spectrometer with bessel-box type energy analyzer for the accurate measurement of partial pressures

Applied Surface Science

Volumn 169-170, Issue , 2001, Pages 752-756

  Takahashi, N ^a   Yanagishita, K ^a   Hayashi, T ^a   Akimichi, H ^a   Tuzi, Y ^a  

^a ULVAC INC   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DESORPTION; IONIZATION OF GASES; IONS; MASS SPECTROMETERS; PHOTONS; VACUUM;

QUADRUPLE MASS SPECTROMETERS;

ELECTRON ENERGY LEVELS;

EID: 0035127779     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(00)00785-6     Document Type: Article

References (3)

1. Nakao F. Rev. Sci. Instrum. 46:1975;1489.
2. Allen J.D. Jr., Durham J.D., Schweitzer G.K., Deeds W.E. J. Electron Spectrosc. Relat. Phenom. 8:1976;395.
3. Akimichi H., Arai T., Takeuchi K., Tuzi Y. J. Vac. Sci. Technol. A. 15:1996;753.