Calibration of an axial symmetric transmission gauge in ultrahigh and extreme high vacuum

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 3, 1997, Pages 753-758

  Akimichi, H ^a   Arai, T ^a   Takeuchi, K ^a   Tuzi, Y ^a   Arakawa, I ^b  

^a ULVAC INC   (Japan)

^b GAKUSHUIN UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0008485547     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580815     Document Type: Article

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