Growth of Nb thin films on SiO2

Applied Surface Science

Volumn 169, Issue 170, 2001, Pages 371-374

  Li, Boquan ^a   Kojima, Isao ^a  

^a Natl Inst M   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL ORIENTATION; EVAPORATION; FILM GROWTH; FUSED SILICA; MORPHOLOGY; NIOBIUM; SURFACE ROUGHNESS; TEXTURES; THERMAL EFFECTS; THIN FILMS; VACUUM; X RAY DIFFRACTION ANALYSIS;

ELECTRON BEAM EVAPORATION;

METALLIC FILMS;

EID: 0035127774     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(00)00686-3     Document Type: Article

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