Surface abstraction reaction of experimental temperatures; a theoretical study of 4H-SiC(0001)

Materials Science Forum

Volumn 353-356, Issue , 2001, Pages 231-234

  Olander, J ^a   Larsson, K ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION; CHEMICAL BONDS; HALOGEN ELEMENTS; HYDROGEN; MOLECULAR DYNAMICS; QUANTUM THEORY; TEMPERATURE;

EXOTHERMIC; HYDROGEN ABSTRACTION;

SILICON CARBIDE;

EID: 0035123031     PISSN: 02555476     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (11)

1. A. Ellison et al., Mat. Sci. and Eng. B61-62 (1999), p.113.
2. E. Srinivasan and G. N. Parsons, Appl.Phys.Lett. 72 (4) (1998), p.456.
3. P. Hohenberg and W. Kohn, Phys. Rev. B 136 (1964), B864.
4. W. Kohn and L.J. Sham, Phys. Rev. 140 (1965) A1133.
5. Car and Parinello, Phys.Rev.Lett. 55 (1985) p.2471.
6. J.P. Perdew, A. Zunger, Phys. Rev. B 23 (1981), p.5048.
7. J.P. Perdew, Y. Wang, Phys. Rev. B 45 (1992), p.13244.
8. L. Kleinman, D.M. Bylander, Phys.Rev.Lett. 48 (1982), p.1425.
9. Y. Ohshita, Mater. Res. Soc. Symp. Proc. 162, 1990.
10. K. Larsson, Lunell, S., J.Phys.Chem. A 101, (1997), p.76.
11. K. Sato. et al., Jpn.J.Appl.Phys. 33 (1994), p.4801.