Microscopic interferometer for surface roughness measurement

Optical Engineering

Volumn 35, Issue 10, 1996, Pages 2956-2961

  Ding, Zhihua ^a   Wang, Guiying ^a   Wang, Zhijiang ^a,b  

^a SHANGHAI INSTITUTE OF OPTICS AND FINE MECHANICS   (China)

^b SPIE ^*

Author keywords

Mirau interferometer; Phase shifting; Profiler; Roughness measurement

Indexed keywords

EID: 0006806799     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.600979     Document Type: Article

References (16)

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