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Volumn 42, Issue 11, 2001, Pages 4867-4872
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Effect of film thickness on the electrical properties of polyimide thin films
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JSR CORPORATION
(Japan)
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Author keywords
Dielectric constant; Polyimide; Thin films
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Indexed keywords
POLYIMIDE;
POLYMER;
ARTICLE;
DIELECTRIC CONSTANT;
ELECTRIC CURRENT;
ELECTRODE;
FILM;
MEASUREMENT;
THICKNESS;
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EID: 0035098729
PISSN: 00323861
EISSN: None
Source Type: Journal
DOI: 10.1016/S0032-3861(00)00881-8 Document Type: Article |
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Times cited : (107)
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References (16)
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