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Volumn 39, Issue 1 T, 2001, Pages 358-361
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Control of electron density and rotation profiles by voltage biased electrodes in RF produced plasma
a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
CARRIER CONCENTRATION;
ELECTRODES;
MAGNETIC FIELDS;
MAGNETIZATION;
PLASMA DENSITY;
PLASMA OSCILLATIONS;
DENSITY OSCILLATION;
ROTATION PROFILE;
VOLTAGE BIASING;
PLASMAS;
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EID: 0035088408
PISSN: 07481896
EISSN: None
Source Type: Journal
DOI: 10.13182/fst01-a11963480 Document Type: Article |
Times cited : (5)
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References (15)
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