Efficient and ballistic cold electron emission from porous polycrystalline silicon diodes with a porosity multilayer structure

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 19, Issue 1, 2001, Pages 64-67

  Sheng, Xia ^a   Kojima, Akira ^a   Komoda, Takuya ^b   Koshida, Nobuyoshi ^a  

^a TOKYO UNIVERSITY OF AGRICULTURE AND TECHNOLOGY   (Japan)

^b PANASONIC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT DENSITY; ELECTRIC FIELD EFFECTS; ELECTRON EMISSION; POLYCRYSTALLINE MATERIALS; POLYSILICON; POROSITY; POROUS SILICON; THERMAL CONDUCTIVITY OF SOLIDS; THIN FILMS;

BALLISTIC COLD ELECTRON EMISSION; POROUS POLYCRYSTALLINE SILICON (PPS) DIODES;

SEMICONDUCTOR DIODES;

EID: 0035087930     PISSN: 0734211X     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1340666     Document Type: Article

References (16)

1. I. Brodie, Proc. IEEE 82, 1006 (1994).
2. R. N. Thomas, R. A. Wickstrom, D. K. Schroder, and H. C. Nathanson, Solid-State Electron. 17, 155 (1974).
3. R. B. Marcus, K. Chin, D. Liu, W. J. Orvis, D. R. Diavlo, C. E. Hunt, and J. Trujillo, Appl. Phys. Lett. 56, 236 (1990).
4. C. A. Mead, Proc. IRE 48, 359 (1960).
5. K. Yokoo, S. Sato, and G. Koshita, J. Vac. Sci. Technol. B 12, 801 (1994).
6. N. Koshida, T. Ozaki, X. Sheng, and H. Koyama, Jpn. J. Appl. Phys., Part 2 34, L705 (1995).
7. X. Sheng, T. Ozaki, H. Koyama, and N. Koshida, Proceedings of the International Symposium on Advanced Luminescent Materials, Chicago, 1995 (Electrochemical Society, Pennington, NJ), pp. 87-93.
8. X. Sheng, H. Koyama, and N. Koshida, J. Vac. Sci. Technol. B 15, 1661 (1997).
9. X. Sheng, H. Koyama, and N. Koshida, J. Vac. Sci. Technol. B 16, 793 (1998).
10. X. Sheng and N. Koshida, Mater. Res. Soc. Symp. Proc. 509, 193 (1998).
11. T. Komoda, X. Sheng, and N. Koshida, Mater. Res. Soc. Symp. Proc. 509, 187 (1998).
12. T. Komoda, X. Sheng, and N. Koshida, J. Vac. Sci. Technol. B 17, 1076 (1999).
13. N. Koshida, X. Sheng, and T. Komoda, Appl. Surf. Sci. 146, 371 (1999).
14. O. Klíma, P. Hlinomaz, A. Hospodková, J. Oswald, and J. Kocka, J. Non-Cryst. Solids 164-166, 961 (1993).
15. H. J. Fitting, Th. Hingst, E. Schreiber, and E. Geib, J. Vac. Sci. Technol. B 14, 2087 (1996).
16. T. Komoda et al., Technical Digest of The Sixth International Display Workshops, Sendai, p. 939.