Fabrication of molybdenum carbide and hafnium carbide field emitter arrays

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 19, Issue 1, 2001, Pages 42-46

  Wei, Yi ^a   Chalamala, Babu R ^a   Rossi, Gene ^a   Palmer, Kathleen ^a   Smith, Bruce G ^a   Reuss, Robert H ^a  

^a MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

HAFNIUM COMPOUNDS; MICROELECTRONICS; MOLYBDENUM COMPOUNDS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMA ETCHING; SCANNING ELECTRON MICROSCOPY; SPUTTER DEPOSITION; SUBSTRATES; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

FIELD EMITTER ARRAYS;

FIELD EMISSION CATHODES;

EID: 0035085413     PISSN: 0734211X     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1343100     Document Type: Article

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