Investigation of thickness effects on AlN coated metal tips by in situ I-V measurement

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 2, 1999, Pages 632-634

  Kang, D H ^a  

^a Campus Box 7908   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 22644452060     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590608     Document Type: Article

References (7)

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