SCOPUS 정보 검색 플랫폼

Volumn 18, Issue 2, 2001, Pages 33-38

Resistivity instrumentation to meet semiconductor processing requirements

Author keywords

Conductivity; Instruments; Monitoring; Resistivity; Semiconductors

Indexed keywords

RESISTIVITY; WATER; WATER INDUSTRY; WATER TREATMENT;

EID: 0035066265 PISSN: 07478291 EISSN: None Source Type: Trade Journal
DOI: None Document Type: Article

Times cited : (1)

References (4)

1
- 0030714332
- The effect of temperature, temperature error, and impurities on compensated conductivity measurements
- Santa Clara, Calif., (March 3-6)
- (1997) 16th Annual Semiconductor Pure Water and Chemical Conference , pp. 131-160
- Bevilacqua, A.C.¹

2
- 0002604541
- Measurement of the resistivity of high-purity water at elevated temperatures
- (December)
- (1994) ULTRA-PURE WATER , vol.11 , Issue.9 , pp. 18-26
- Morash, K.R.¹ Thornton, R.D.² Saunders, C.H.³ Bevilacqua, A.C.⁴ Light, T.S.⁵

3
- 0005487267
- Unique temperature compensation for conductivity and resistivity measurements
- (January/February)
- (1996) ULTRA-PURE WATER , vol.13 , Issue.1 , pp. 60-62
- Gray, D.M.¹ Bevilacqua, A.C.²

4
- 0005503882
- Specific conductivity temperature compensation
- Pittburgh, Pa. (October 16-20)
- (1999) International Water Conference
- Gray, D.M.¹ Bevilacqua, A.C.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.