Effect of temperature, temperature error, and impurities on compensated conductivity measurements

Conference Proceedings - Annual Semiconductor Pure Water and Chemicals Conference

Volumn 1, Issue , 1997, Pages 131-160

  Bevilacqua, A C ^a  

^a Thornton Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CONDUCTIVITY MEASUREMENT; IMPURITIES; INDUSTRIAL WATER TREATMENT; SEMICONDUCTOR DEVICE MANUFACTURE; WATER ANALYSIS; WATER QUALITY;

ULTRA PURE WATER;

ELECTRIC CONDUCTIVITY OF LIQUIDS;

EID: 0030714332     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)