Comparison of the microstructure of titanium oxide films deposited on silicon and LTI-carbon

Surface and Coatings Technology

Volumn 137, Issue 1, 2001, Pages 6-11

  Wang, Xianghui ^a   Zhang, Feng ^a   Li, Changrong ^a   Zheng, Zhihong ^a   Liu, Xianghuai ^a  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

Author keywords

Ion beam enhanced deposition; LTI carbon; Silicon; Structure; Titanium oxide film

Indexed keywords

CARBON; HEART VALVE PROSTHESES; ION BEAM ASSISTED DEPOSITION; MICROSTRUCTURE; SILICON WAFERS; THIN FILMS; TITANIUM OXIDES; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

AMORPHOUS INTERLAYERS;

COATINGS;

FILM; MEDICAL APPLICATION; SOLID LUBRICANT; TITANIUM;

EID: 0035058937     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(00)00915-4     Document Type: Article

References (10)