Unambiguous interferometric surface profilometry using ferroelectric liquid crystal modulators

Journal of Electronic Imaging

Volumn 10, Issue 1, 2001, Pages 263-267

  Begbie, Mark L ^a   Lesso, J Paul ^b   Sibbett, Wilson ^b   Padgett, Miles ^a  

^a UNIVERSITY OF GLASGOW   (United Kingdom)

^b UNIVERSITY OF ST ANDREWS   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

FERROELECTRIC LIQUID CRYSTAL MODULATORS;

ERROR CORRECTION; FERROELECTRIC MATERIALS; IMAGE PROCESSING; LIQUID CRYSTALS; POLARIMETERS; PROFILOMETRY; SURFACE PROPERTIES;

INTERFEROMETRY;

EID: 0035057230     PISSN: 10179909     EISSN: 1560229X     Source Type: Journal    
DOI: 10.1117/1.1313241     Document Type: Article

References (9)

1. Unambiguous measurement of surface profile using a Sagnac interferometer with phase feedback
2. Phase-measurement interferometry techniques
3. Advanced evaluation techniques in interferometry
4. High-speed non-contact profiler based on scanning white-light interferometry
5. Fast surface profiling by spectral analysis of white-light interferograms with Fourier transform spectroscopy
6. Surface profilometry based on polarization analysis