Fabricating and testing diffractive optical elements focusing into a ring and into a twin-spot

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4316, Issue , 2001, Pages 193-199

  Kazanskiy, N L ^a   Uspleniev, G V ^a   Volkov, A V ^a  

^a Image Processing Systems Institute Russian Academy of Sciences   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAM LITHOGRAPHY; FABRICATION; FOCUSING; INFRARED RADIATION; LENSES; SUBSTRATES; TESTING;

CIRCULAR LASER WRITING SYSTEM; DIFFRACTIVE OPTICAL ELEMENTS; PHOTOMASKS;

DIFFRACTION GRATINGS;

EID: 0035050871     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.407678     Document Type: Conference Paper

References (6)

1. Focusing light into a specified volume by computer synthesized holograms
2. Infra-red radiation focusators
3. Fabrication of diffractive optical elements by direct laser writing with circular scanning
4. Photomask fabrication of focusing diffractive optical elements using electron beam lithography
5. A method for synthesizing the phase structure of a kinoform