Photomask fabrication of focusing diffractive optical elements using electron-beam lithography

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2426, Issue , 1995, Pages 215-227

  Babin, Sergei V ^a   Danilov, Victor A ^a  

^a UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTIVE OPTICAL ELEMENTS; PHOTOMASKS;

DIFFRACTION; ELECTRON BEAM LITHOGRAPHY; FABRICATION; FOCUSING; INDUSTRIAL APPLICATIONS; LASER BEAMS; LASER WELDING; OPTICAL SYSTEMS; REFRACTIVE INDEX;

MASKS;

EID: 0029512040     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (20)