Improvement of process stability for PZT thin films formation by using modified sol-gel solutions

Integrated Ferroelectrics

Volumn 33, Issue 1-4, 2001, Pages 227-234

  Soyama, Nobuyuki ^a   Maki, Kazunari ^a   Mori, Satoru ^a   Ogi, Katsumi ^a  

^a MITSUBISHI MATERIALS CORPORATION   (Japan)

Author keywords

Microstructure; Nucleation; Pb content; PZT; Sol gel

Indexed keywords

ELECTRIC PROPERTIES; FERROELECTRIC DEVICES; LEAD; MICROSTRUCTURE; MORPHOLOGY; NUCLEATION; PEROVSKITE; SEMICONDUCTING LEAD COMPOUNDS; SOL-GELS;

FERROELECTRIC RANDOM ACCESS MEMORY; LEAD ZIRCONATE TITANATE; NUCLEATION DENSITY;

THIN FILMS;

EID: 0035032136     PISSN: 10584587     EISSN: None     Source Type: Journal    
DOI: 10.1080/10584580108222304     Document Type: Conference Paper

References (9)