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Volumn 4190, Issue , 2001, Pages 123-132

Full field, time dependent heterodyne interferometer for shape measurement: Theory and experiment

Author keywords

Animation; Heterodyne interferometry; Surface shape measurement

Indexed keywords

ACOUSTOOPTICAL DEVICES; ANIMATION; CAMERAS; CHARGE COUPLED DEVICES; COMPUTER SIMULATION; ERROR ANALYSIS; MEASUREMENT ERRORS; MODULATORS; OPTICAL SYSTEMS; SURFACE MEASUREMENT;

EID: 0035022988     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.417218     Document Type: Article
Times cited : (3)

References (8)
  • 5
    • 0003613824 scopus 로고    scopus 로고
    • Analysis of the influence of the full-field heterodyne interferometer design on the precision of surface shape measurements
    • Doctor Thesis, Dep. of Mechatronics, Warsaw University of Technology, Warsaw; (in Polish)
    • (2000)
    • Tkaczyk, T.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.