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Volumn 363-365, Issue , 2001, Pages 56-60
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Defect physics investigations using positron and ion beams
a a b,c |
Author keywords
Electric fields; Garboldisham; Ion implantation; Silicon; Vacancies
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Indexed keywords
CRYSTAL DEFECTS;
ELECTRON ENERGY LEVELS;
ION BEAMS;
ION IMPLANTATION;
IRRADIATION;
POSITRONS;
SEMICONDUCTING SILICON;
DAMAGE CASCADES;
DEFECT ACCUMULATION;
DEFECT CONCENTRATIONS;
DEFECT PHYSICS;
POSITRON BEAMS;
VACANCY FORMATION ENERGY;
SOLID STATE PHYSICS;
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EID: 0035008109
PISSN: 02555476
EISSN: 16629752
Source Type: Book Series
DOI: 10.4028/www.scientific.net/msf.363-365.56 Document Type: Conference Paper |
Times cited : (4)
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References (13)
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