|
|
Volumn 78-79, Issue , 2001, Pages 19-28
|
|
Challenging the spatial resolution limits of CL and EBIC
a
|
|
Author keywords
Cathodoluminescence; CL; EBIC; Electron beam induced current; Scanning electron microscopy; SEM; Spatial resolution
|
|
Indexed keywords
ELECTRIC CURRENTS;
ELECTRON BEAMS;
OPTICAL RESOLVING POWER;
OPTIMIZATION;
SCANNING ELECTRON MICROSCOPY;
ELECTRON BEAM INDUCED CURRENT;
SPATIAL RESOLUTION;
CATHODOLUMINESCENCE;
|
|
EID: 0034999771
PISSN: 10120394
EISSN: None
Source Type: Book Series
DOI: 10.4028/www.scientific.net/ssp.78-79.19 Document Type: Conference Paper |
|
Times cited : (20)
|
|
References (11)
|
